| 摘要 |
PROBLEM TO BE SOLVED: To provide a film formation method which enables the formation of a desired functional film. SOLUTION: In the method for forming a functional film on a substrate 48 by delivering a liquid matter 2 with a liquid droplet delivery device, a silicone oil or a silane coupling agent is mixed into the liquid matter 2 before its delivering; thus, the silicone oil or the silane coupling agent, both having a boiling point higher than that of the solvent of the delivered liquid droplets 4, is adsorbed by the surface of the droplets 4. Since a film 6 of the silicone oil or the silane coupling agent is formed on the surface of the liquid droplets 4, the drying rate of the liquid droplets 4 by the evaporation of the low-boiling-point solvent is decreased; thus, the drying conditions of the liquid droplets 4 can be controlled, enabling the formation of a desired functional film. COPYRIGHT: (C)2005,JPO&NCIPI
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