SUBSTRATE CARRYING APPARATUS, SUBSTRATE CARRYING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

摘要

A substrate carrying apparatus for conveying a substrate which is exposed using a pattern image through a projection optical system and a liquid is characterized by comprising a liquid sensor for sensing the liquid adhered to the substrate. A substrate carrying method for conveying a substrate which is exposed using a pattern image through a projection optical system and a liquid is characterized by sensing the liquid adhered to the substrate along the conveying route of the substrate.