发明名称 SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor memory device which performs normal read-out even if an excess-written memory cell exists in a NAND type MONOS memory, and also to provide its manufacturing method. <P>SOLUTION: MONOS memory cells TR1-TR4 are provided in series between a bit line BL and a ground potential GND of a silicon substrate. Word lines WL1-4 corresponding to each memory cell are provided. MOSFET TR1F-TR4F are connected respectively in parallel to the MONOS memory cells TR1-TR4. These MOSFET is a normal enhancement type element which is turned on sufficiently by power source voltage Vcc for a gate. A threshold value of these MODFET is set at a value being higher than reference voltage 0V and being a threshold value of a write-in state or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005108373(A) 申请公布日期 2005.04.21
申请号 JP20030343031 申请日期 2003.10.01
申请人 SEIKO EPSON CORP 发明人 TAKEDA ISAO
分类号 G11C16/02;G11C16/04;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C16/02;H01L21/824 主分类号 G11C16/02
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