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发明名称
METHOD FOR FORMING UNDOPED SILICATE GLASS LAYER
摘要
申请公布号
KR100486235(B1)
申请公布日期
2005.04.21
申请号
KR19980009966
申请日期
1998.03.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, YONG GAP;KIM, WON JU;BYUN, JEONG U
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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