Method of manufacturing piezoelectric elements using sacrificial material
摘要
A piezoelectric composite (3) is formed from a piezoelectric precursor (1) prepared by mixing a powder containing piezoelectric material with a binder material and a gap forming material (2) filling a gap formed to the piezoelectric precursor. The gap forming material is removed from the thus formed piezoelectric composite, and a piezoelectric element (4) is then formed by sintering. <IMAGE> <IMAGE> <IMAGE>