发明名称 Vibration control of an object
摘要 An apparatus for controlling motion of an object includes a first actuator for moving the object, an elastic-motion measuring unit for measuring elastic motion of the object, and a control unit for controlling the first actuator based on a result of measurement of the elastic-motion measuring unit. Another apparatus for controlling motion of an object includes a first actuator for moving the object, a second actuator for suppressing elastic motion of the object, and a control unit for controlling the second actuator based on a result of predicting the elastic motion of the object caused by the first actuator.
申请公布号 US6881963(B2) 申请公布日期 2005.04.19
申请号 US20030698528 申请日期 2003.11.03
申请人 CANON KABUSHIKI KAISHA 发明人 ITO HIROSHI
分类号 F16F7/10;F16F15/00;F16F15/03;H01L21/68;H01L21/687;(IPC1-7):F16F7/10;G01M7/02 主分类号 F16F7/10
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