| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal injector which can compensate the temperature drops of the liquid crystal cells in the vacuumizing process. SOLUTION: This injector comprises a cassette 3 storing liquid crystal cells 1, a vacuum chamber 11 to which a liquid crystal pan 2 having the liquid crystals to fill into the above liquid crystal cells 1 is carried in, a liquid crystal pan elevator mechanism 16 provided in the above vacuum chamber 11 to move up and down the cassette tray 4 having a built-in heater 12 to mount the above cassette 3 and the above liquid crystal pan 2, a vacuum pump 13 and vacuum valve 14 to evacuate the inside of the above vacuum chamber 11, and an N<SB>2</SB>gas inlet valve 15 and an N<SB>2</SB>gas source 19 to fill N<SB>2</SB>gas inside the above vacuum chamber 11. The temperature drops of the liquid crystal cells 1 in the vacuumizing process are compensated by heating with the built-in heater 12 of the above cassette tray. COPYRIGHT: (C)2005,JPO&NCIPI
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