| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of a positioning fault caused by a difference of positioning references. SOLUTION: The positioning apparatus comprises: a storage section 8 for setting a part to be defined as a positioning reference; a measure for detecting the part on a substrate set by a setting section 8; and a driving mechanism 3 for driving the substrate such that the part detected by the measure match the target position. COPYRIGHT: (C)2005,JPO&NCIPI |
