| 发明名称 |
DLC FILM AND VACUUM CHUCK EQUIPPED WITH ITS FILM |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck having a DLC film and having a low thermal expansibility and even an excellent corrosion resistance. SOLUTION: The vacuum chuck 10 has a structure in which the DLC (a diamond-like carbon) film 12 is formed on the surface of a base material 11 composed of low thermal expansible ceramics. A linear thermal expansion coefficient within the range of 23°C±3°C of the base material 11 is set in 2.0×10<SP>-6</SP>/°C or lower. It is preferable that the thickness of the DLC film 12 extends from 3μm to 40μm. COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005101247(A) |
申请公布日期 |
2005.04.14 |
| 申请号 |
JP20030332740 |
申请日期 |
2003.09.25 |
| 申请人 |
TAIHEIYO CEMENT CORP |
发明人 |
OGURA TOMOYUKI;UMEKI AKIKO;SHIOGAI TATSUYA |
| 分类号 |
B23Q3/08;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
B23Q3/08 |
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