发明名称 MANUFACTURING METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a device capable of reducing distortion caused in an element thereby reducing a change of characteristics in the element. SOLUTION: This method for manufacturing the device equipped with the element and a base material for fixing the element comprises: a base material preparing stage in which a base material having a larger coefficient of linear expansion than that of the element is prepared; a groove forming stage in which a plurality of grooves are formed on the surface of the base material; a coating stage in which an adhesive is applied on the area formed with the plurality of grooves in the surface of the base material; and a sticking stage in which the element is bonded to the surface of the base material. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005099382(A) 申请公布日期 2005.04.14
申请号 JP20030332518 申请日期 2003.09.24
申请人 ADVANTEST CORP 发明人 MASUDA SHIN
分类号 G02B7/00;(IPC1-7):G02B7/00 主分类号 G02B7/00
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