| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavefront aberration correction mirror in which a sufficient displacement is available even in a low voltage driving, the structure thereof is hardly broken, and the yield of mass production is high. <P>SOLUTION: The wavefront aberration correction mirror has a membrane structure in which a mirror substrate (6) composed of Si is formed in a concave surface by an anisotropic etching, a mirror surface of a metallic thin film (1) having a high reflectance is formed on the surface of the mirror substrate (6), further, a piezo-electric element (2) is stuck on the back face (in the concave face) of the mirror, a slit (11) is formed around the mirror substrate (6), an outer frame (17) and the mirror substrate (6) are connected with a supporting body (10), and the supporting body (10) has a high strength and is hardly broken because the supporting body (10) is formed to have a larger thickness than that of the mirror substrate (6). <P>COPYRIGHT: (C)2005,JPO&NCIPI |
