| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element with a high function and high precision that uses a 2D slab type photonic crystal and a thin-line waveguide by using a photonic crystal and a thin-line waveguide using a porous layer for a clad. SOLUTION: Presented is the optical element comprising a substrate, a porous layer laid on the substrate having a pore diameter smaller than the wavelength of light and a crystal layer laid on the porous layer having a refractive index greater than that of the porous layer is presented. Further, disclosed is the method for the optical element comprising a step of forming the porous layer having the pore diameter smaller than the wavelength of light on the surface of the substrate and a step of forming by epitaxial growth the crystal layer having the refractive index greater than that of the porous layer on the porous layer. COPYRIGHT: (C)2005,JPO&NCIPI |
