| 摘要 |
PROBLEM TO BE SOLVED: To reduce an image blur of an observed image by suppressing vibration from the device, noise or air vibration due to down flow. SOLUTION: Near the observation surface of a liquid crystal substrate 5, there is installed, in a manner covering this substrate 5, a soundproof plate 23 having an observation opening part 24 on the optical axis of the objective lens 15 of the microscope 13. COPYRIGHT: (C)2005,JPO&NCIPI
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