| 摘要 |
PROBLEM TO BE SOLVED: To stably conduct automatic interference measurement of a sample, by slightly changing the inrush current of LD, until a computed value exceeds a threshold, when the computed modulation value of the acquired interference fringe image is below the threshold, or by returning to the proper conditions of a contrast promptly, also when an interference fringe contrast falls according to a mode-hop phenomenon. SOLUTION: The interference fringe image of a sample is acquired with an interferometer device (S1), modulation valueγfor every pixel is computed by analyzing an interference fringes image (S2), and it is determined whether in more than a regulated number, there are pixels in which this modulation valueγexceeds a predetermined threshold (S3). If it is determined that the number is more than the stipulated number, normal interference fringe image analysis processing is performed (S4), whereas if it is determined that the regulated number has not been reached, the inrush current of LD11 is changed only by the predetermined minute amount (S5). Thereafter, the is returned to Step 1 (S1), and this series of processes are repeated. COPYRIGHT: (C)2005,JPO&NCIPI
|
