A METHOD AND A SYSTEM FOR AUTOMATICALLY CONTROLLING A CURRENT DISTRIBUTION OF A MULTI-ANODE ARRANGEMENT DURING THE PLATING OF A METAL ON A SUBSTRATE SURFACE

摘要

An electroplating tool is operated in combination with a controller, which automatically determines the individual currents for a multi-anode configuration of the plating tool. The calculation of the anode currents may be based on sensitivity data and measurement data as well as on a desired target profile, so that a fast response with respect to process variations may be achieved even for a plating tool including a plurality of process chambers.