发明名称 THIN FILM TRANSISTOR, ITS MANUFACTURING METHOD AND METHOD OF MANUFACTURING DISPLAY
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a thin film transistor, its manufacturing method, and a method of manufacturing a display using the thin film transistor which simplifies a manufacturing process to manufacture it at a low cost and a high yield. <P>SOLUTION: A pattern usable in a patterning process is formed by a drop discharge method which selectively discharges a compound containing an organic resin to form a pattern. Using the pattern, a conductor, an insulator or a semiconductor for constituting a semiconductor element is patterned into a desired form by a simple process. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005101578(A) 申请公布日期 2005.04.14
申请号 JP20040246503 申请日期 2004.08.26
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 MAEKAWA SHINJI;FUKUCHI KUNIHIKO;FUJII ITSUKI;MURANAKA KOJI;NAKAMURA OSAMU
分类号 G02F1/1368;H01L21/027;H01L21/288;H01L21/312;H01L21/3205;H01L21/336;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):H01L21/336;H01L21/320;G02F1/136 主分类号 G02F1/1368
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