发明名称 |
THIN FILM TRANSISTOR, ITS MANUFACTURING METHOD AND METHOD OF MANUFACTURING DISPLAY |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film transistor, its manufacturing method, and a method of manufacturing a display using the thin film transistor which simplifies a manufacturing process to manufacture it at a low cost and a high yield. <P>SOLUTION: A pattern usable in a patterning process is formed by a drop discharge method which selectively discharges a compound containing an organic resin to form a pattern. Using the pattern, a conductor, an insulator or a semiconductor for constituting a semiconductor element is patterned into a desired form by a simple process. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005101578(A) |
申请公布日期 |
2005.04.14 |
申请号 |
JP20040246503 |
申请日期 |
2004.08.26 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
MAEKAWA SHINJI;FUKUCHI KUNIHIKO;FUJII ITSUKI;MURANAKA KOJI;NAKAMURA OSAMU |
分类号 |
G02F1/1368;H01L21/027;H01L21/288;H01L21/312;H01L21/3205;H01L21/336;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):H01L21/336;H01L21/320;G02F1/136 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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