发明名称 |
SMART LASER WITH FAST DEFORMABLE GRATING |
摘要 |
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. |
申请公布号 |
EP1330859(A4) |
申请公布日期 |
2005.04.13 |
申请号 |
EP20010273238 |
申请日期 |
2001.10.05 |
申请人 |
CYMER, INC. |
发明人 |
FOMENKOV, IGOR, V.;ERIE, FREDERICK, G.;BUCK, JESSE, D.;DAS, PALASH, P. |
分类号 |
H01S3/225;G02B5/18;G02B27/44;G03F7/20;H01S3/03;H01S3/034;H01S3/08;H01S3/081;H01S3/086;H01S3/13;H01S3/134;H01S3/137;H01S3/139 |
主分类号 |
H01S3/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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