发明名称 SMART LASER WITH FAST DEFORMABLE GRATING
摘要 A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.
申请公布号 EP1330859(A4) 申请公布日期 2005.04.13
申请号 EP20010273238 申请日期 2001.10.05
申请人 CYMER, INC. 发明人 FOMENKOV, IGOR, V.;ERIE, FREDERICK, G.;BUCK, JESSE, D.;DAS, PALASH, P.
分类号 H01S3/225;G02B5/18;G02B27/44;G03F7/20;H01S3/03;H01S3/034;H01S3/08;H01S3/081;H01S3/086;H01S3/13;H01S3/134;H01S3/137;H01S3/139 主分类号 H01S3/225
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