APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND SEALING MEMBER USED IN THE APPARATUS

摘要

An apparatus for manufacturing a semiconductor devices and a sealing member to be used in the same are provided to improve the performance of a sealing member by changing the circle type section profile of the sealing member into a mushroom type section profile. An observation unit(200) includes a window(220) to be formed in one side of a process chamber and a window cover(240) surrounding the edge of the window. A sealing member(300) seals the window and the window cover. The sealing member is provided with a head and an inserting portion. The inserting portion extends from one end of the head, and has a section profile of a smaller size than that of the head. A ring shaped groove(244) into that the inserting portion of the sealing member is inserted, is formed in one side of the window cover. The one end of head of the sealing member has a wider section profile than that of the groove.