| 摘要 |
Provided is a device for coating a photosensitive resin, which has a simple structure, causes a photosensitizer to be coated with ease, and forms a coating film of high coating quality through a leveling process under an optimum pressure. The device for coating a photosensitive resin comprises: a bath(2) providing a zone where the photosensitive resin is coated; a photosensitizer spraying means(4) for coating the photosensitive resin on the surface of a substrate(P), which is disposed in the bath, corresponding to a position where the substrate(P) is set; and a pressure maintaining means(6) for maintaining the inner space of the bath at a constant pressure, which creates and maintains a vapor pressure environment in the space of the bath corresponding to the coating zone of the substrate by using a spraying fluid.
|
