ALIGNER OF THE WAFER TRANSFER STATION AND METHOD THE SAME

摘要

An apparatus for aligning a wafer transfer station is provided to reduce damage to a wafer in transferring the wafer by horizontally aligning the wafer even though the wafer is slantingly placed on a wafer guide. A wafer existence detecting part(108) detects whether a wafer exists, installed in either one of at least two wafer support members(102). At least two align driver parts(110) whose length increases or decreases are disposed between the wafer support members. A hanging plate(114) comes in contact with the end of the wafer placed in a wafer guide(104), vertically connected to the end of the align driver part. A controller operates the align driver part when the wafer existence is detected by the wafer existence detecting part and horizontally aligns the wafer placed in the wafer guide through the hanging plate.