| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz friction vacuum gauge which improves corrosion resistivity by preventing corrosion of electrode part of a quartz vibrator, prevents aging variation of temperature dependence concerning the intrinsic resonance impedance of the quartz vibrator and its inclination, capable of stably keeping the intrinsic resonance impedance constant, and improved in measurement accuracy of pressure, and reliability and life as a pressure measurement apparatus. SOLUTION: The quartz friction vacuum gauge measures objective pressure by measuring resonance impedance of a quartz vibrator 18 which is varying with pressure variation. The quartz vibrator 18 comprises an electrode 32 consisting of bilayer structure of Au film 34, Cr film 33, and at least the side exposure part of the Cr film is covered with a coat film 35 for preventing corrosion of Cr film. COPYRIGHT: (C)2005,JPO&NCIPI
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