Hermetically sealed process chamber e.g. for liquid pumps or radial compressors, has shaft vibrations influenced by electromagnetic forces generated with permanent magnets and coil

摘要

A process chamber has integrated rotatable actuator consisting of an electric motor, in which the stator (47) and rotor are separated with its shaft (1) by a collimator tube (41), which is joined hermetically-tightly with the wall of the process chamber or forms the wall of this process chamber so that the rotor lies with its shaft (1) within the process chamber. The shaft (1) is mounted with at least one passive magnetic bearing (44,45) and any vibration of the shaft is influenced by electromagnetic forces which are generated with at least one permanent magnet and at least one coil, in which with at least one sensor, one computer drive and a power amplifier the currents in at least one coil are adjusted. An independent claim is also included for a processor chamber arrangement.