| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying roller apparatus by which the sticking of dust to a work is avoided as much as possible, the thermal deformation of the work is suppressed and even a relatively small work is stably conveyed. SOLUTION: The conveying roller apparatus is provided with a plurality of fixed rollers 20 arranged in the conveying direction of a work W, a plurality of elevating rollers 30 vertically movable and alternately arranged with a plurality of the fixed rollers 20, a supporting member 51 for supporting a plurality of the elevating rollers 30, a vertically driving means 50 for vertically moving the supporting member 51 and a rotary driving means 40 for rotating a plurality of the fixed rollers and a plurality of the elevating rollers 30. As a result, the frequency of the contact of the work W with the rollers is reduced to decrease the sticking of dust to the work W, to suppress the thermal deformation of the work W and to prevent the degradation of the quality of the work W. COPYRIGHT: (C)2005,JPO&NCIPI
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