METHOD AND APPARATUS FOR MEASURING PROFILE OF CONTINUOUS BODY BY MONOTONICALLY INCREASING WAVEFORM PROJECTION

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring a profile allowing a quick measurement of the shape of an object moving at a nearly constant velocity on a reference plane. SOLUTION: The intensity on a certain point of the object obtained by a first line sensor placed nearly perpendicular to the reference plane is set to be I1. The intensity on the same point of the object obtained by a second line sensor placed nearly perpendicular to the reference plane and predetermined distance apart from the first line sensor in the moving direction of the object when irradiating with light having a nearly uniform intensity distribution in a slanting direction is set to be I2. The intensity on the same point of the object obtained by a third line sensor placed nearly perpendicular to the reference plane and the predetermined distance apart from the second line sensor in the moving direction of the object when irradiating with light having a density gradient pattern in a slanting direction is set to be I3. The intensity ratio J=(I2-I1)/(I3-I1) is represented as a function F(h) of height h on the same point of the object. The height h is determined by h=F-1(J). COPYRIGHT: (C)2005,JPO&NCIPI