| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost and small-sized leak tester for performing leak determination on objects under measurement automatically with high accuracy. SOLUTION: Measurement operation for leak determination is performed in the order of a pressurization process, a balance process, a measurement process, and an exhaust process. In the pressurization process, volume data on the objects 2 under measurement are automatically estimated. In this automatic estimation on the volume data, the volume of the objects under measurement including an endoscope 2 is estimated by performing pressure measurement by using a gage pressure sensor 17, not in a transient state that is the start-up of pressurization, but in a state where, after pressurization is once stopped, pressure in a conduit 13 has become substantially uniform, including the endoscope 2 and the pressure sensor 17. In the measurement process, based on the volume data and on a pressure drop value measured by the pressure sensor during a definite time period, it is determined which portion of a preset characteristic area is applicable, thereby determining the state of leak. An output from the pressure sensor 17 is amplified as need be for observation. COPYRIGHT: (C)2005,JPO&NCIPI |
