| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for joining an anode having a smaller number of work man-hours, a higher conforming item rate and improved safety. SOLUTION: A base plate 7 composed of ceramic having good machinability whose main components are aluminum nitride and boron nitride is provided as a member for holding and positioning glass substrates 1 and 1a and a silicon wafer 2 as joining target substrates. The base plate 7 is comprised of a holding plate 71 for supporting the joining target substrates, and a work guide 72 for positioning the joining target substrates. It is also effective to attach a heating plate 6 composed of the ceramic to the upper surface of a heater 3. In this case, guide holes 711 are formed in the holding plate 71, and base plate guides 62 are provided on the heating plate 6. COPYRIGHT: (C)2005,JPO&NCIPI
|
