| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope allowing a magnetization distribution on a surface of a magnetic body sample to be observed with high magnification. SOLUTION: This scanning electron microscope is equipped with: an electron source 17; electron beam converging means 7, 21 and 22 composed by including the lens 7 for converging an electron beam emitted from the electron source to emit it to a sample 6 installed in a magnetic field of a magnetic field lens 7; an electron beam sweeping means 23 for two-dimensionally sweeping the electron beam over the sample 6; a secondary electron optical system 8 for guiding secondary electrons emitted from the sample 6 in a direction opposite to that of the electron beam to form an image thereof; and a detection means 30 for detecting the degree of spin-polarization of the secondary electrons guided by the secondary electron optical system. By guiding the secondary electrons to the detection means 30 for the degree of spin-polarization of the secondary electrons by restraining dispersion of spin directions of the secondary electrons as much as possible, the magnetization distribution on the surface of the magnetic body sample is observed with high magnification. COPYRIGHT: (C)2005,JPO&NCIPI
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