NEAR-FIELD LIGHT GENERATING METHOD NEAR-FIELD EXPOSURE MASK AND NEAR-FIELD EXPOSURE METHOD AND APPARATUS

摘要

A near-field light generating method for forming a fine light spot at a portion adjacent to a fine opening having a size of not more than a wavelength of light on a light outgoing side of the fine opening by irradiating the fine opening with the light includes a step of forming a light spot having a length and a width which are substantially equal to each other by the fine opening. The fine opening has a rectangular shape having a length and a width which are different from each other.