| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical cavity surface emitting laser which can control the polarization direction of a laser beam readily, and to provide its manufacturing method. SOLUTION: The vertical cavity surface emitting laser 100 has a vertical resonator 140 above a substrate 101. The vertical resonator 140 comprises a first mirror 102, an active layer 103 and a second mirror 104 disposed from the substrate 101 side. The vertical resonator 140 has a plurality of unit resonators 10, 12 and a light emission region of each of the unit resonators 10, 12 has a diameter which oscillates at a single mode. COPYRIGHT: (C)2005,JPO&NCIPI
|
