METHOD AND DEVICE FOR OBSERVING INTERNAL STRUCTURE, AND SAMPLE HOLDER FOR INTERNAL STRUCTURE OBSERVATION

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for observing internal structure, and a sample holder for the internal structure observation capable of tracking a change with the lapse of time from a nondefective to a defective in the same sample and the same view field to discover a mechanism of defective occurrence. SOLUTION: In this method for observing the internal structure of the present invention, a sample is irradiated with a primary corpuscular beam generated from a particle source to detect transmitted particles transmitted through the sample, and a voltage is impressed partially to the sample to observe from time to time a detection condition of the transmitted particle in an impressed portion. COPYRIGHT: (C)2005,JPO&NCIPI