| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple analyzer that captures a substance in a particulate adhering to an object easily and efficiently and extracting an analysis object. SOLUTION: A detector of air particulate sucks gas to be measured from a measurement target by a suction pump, and extracts particulates contained in the gas to be measured for measuring by the analyzer. An inertia impactor for capturing particulates having at least a specified particle diameter is arranged at the upstream side of the analyzer, particulates are supplemented by the particulate capturing section of the inertia impactor, the capturing section containing the supplemented particulates is heated to vaporize the captured particulates for evaporation, and the vaporized fluid to be inspected is supplied to the analyzer for measurement. COPYRIGHT: (C)2005,JPO&NCIPI
|
