PROCESS FOR LAMINATING A DIELECTRIC LAYER ONTO A SEMICONDUCTOR
摘要
<p>This invention relates to processes useful for fabricating electronic devices, more particularly to a process for laminating a layer of dielectric material onto a semiconductor.</p>
申请公布号
WO2005031890(A1)
申请公布日期
2005.04.07
申请号
WO2004US31971
申请日期
2004.09.24
申请人
E.I. DUPONT DE NEMOURS AND COMPANY;METH, JEFFREY;NUNES, GEOFFREY;SHARP, KENNETH;WHELAND, ROBERT
发明人
METH, JEFFREY;NUNES, GEOFFREY;SHARP, KENNETH;WHELAND, ROBERT