发明名称 Apparatus and method for fabricating layered periodic media
摘要 An apparatus and method for fabricating a thin layer periodic structure by successively depositing alternating uniform layers of two or more different dielectric materials on a substrate utilizing centrifugal force in a novel spin coating technique. In an alternate embodiment of the present invention, the novel spin-coating technique is configured for fabricating chiral media by successively depositing layers of one or more anisotropic materials, while rotating the substrate by a predetermined angle between deposition of each layer. In both embodiments of the inventive apparatus, a defect layer may be introduced by depositing a defect material in a desired position in the media.
申请公布号 US6875276(B2) 申请公布日期 2005.04.05
申请号 US20020172119 申请日期 2002.06.14
申请人 CHIRAL PHOTONICS, INC. 发明人 SHIBAYEV PETER;KOPP VICTOR IL'ICH
分类号 B05D1/00;B05D7/00;G02B1/10;(IPC1-7):B05C11/02 主分类号 B05D1/00
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