发明名称 THERMAL TREATING APPARATUS
摘要 A thermal treatment apparatus, characterized by comprising a heating furnace body having an opening part provided at the upper end thereof, a heating means installed on the inner wall of the heating furnace body, a reaction container formed of a single tube stored inside the heating furnace body, an exhaust pipe connection part formed at the upper part of the reaction container, and a first temperature control means installed on the peripheral surface of the exhaust pipe connection part.
申请公布号 KR20050031058(A) 申请公布日期 2005.04.01
申请号 KR20047004687 申请日期 2004.03.30
申请人 TOKYO ELECTRON LIMITED 发明人 HASEBE, KAZUHIDE;MAKIYA, TOSHIYUKI;OSANAI, HISAEI;SAITO, TAKANORI;SAITO, YUKIMASA;SHIMAZU, TOMOHISA;TAKIZAWA, TSUYOSHI;YAMAGA, KENICHI;YAMAMOTO, HIROYUKI
分类号 C23C16/44;C23C16/455;H01L21/00;H01L21/205;H01L21/22;(IPC1-7):H01L21/205 主分类号 C23C16/44
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