发明名称 |
THERMAL TREATING APPARATUS |
摘要 |
A thermal treatment apparatus, characterized by comprising a heating furnace body having an opening part provided at the upper end thereof, a heating means installed on the inner wall of the heating furnace body, a reaction container formed of a single tube stored inside the heating furnace body, an exhaust pipe connection part formed at the upper part of the reaction container, and a first temperature control means installed on the peripheral surface of the exhaust pipe connection part.
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申请公布号 |
KR20050031058(A) |
申请公布日期 |
2005.04.01 |
申请号 |
KR20047004687 |
申请日期 |
2004.03.30 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HASEBE, KAZUHIDE;MAKIYA, TOSHIYUKI;OSANAI, HISAEI;SAITO, TAKANORI;SAITO, YUKIMASA;SHIMAZU, TOMOHISA;TAKIZAWA, TSUYOSHI;YAMAGA, KENICHI;YAMAMOTO, HIROYUKI |
分类号 |
C23C16/44;C23C16/455;H01L21/00;H01L21/205;H01L21/22;(IPC1-7):H01L21/205 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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