TREATING METHOD OF POLISHING WASTE LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a treating method of polishing waste liquid suitable for a polishing apparatus which is relatively small-scale and small-sized. SOLUTION: The treating method of polishing waste liquid includes a solidifying process 3 of feeding a polymer water absorbing agent 5 to polishing waste liquid 2 and performing agitation and solidification. COPYRIGHT: (C)2005,JPO&NCIPI