| 发明名称 |
REFLECTIVE SPATIAL LIGHT MODULATOR |
| 摘要 |
The micromirror (202) is fabricated from a wafer of single material, and having a mirror plate (204) on top of it. The mirror plate (204) is connected to a torsion spring hinge (206) by a connector (216). The torsion spring hinge (206) is connected to a spacer support frame (210). |
| 申请公布号 |
WO2004001487(A3) |
申请公布日期 |
2005.03.31 |
| 申请号 |
WO2003US17299 |
申请日期 |
2003.05.30 |
| 申请人 |
MIRADIA, INC. |
发明人 |
PAN, SHAOHER, X.;CHEN, DONGMIN;YANG, XIAO;ZHANG, SHOUCHENG |
| 分类号 |
G02F1/00;G02B26/08;G02B26/10 |
主分类号 |
G02F1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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