| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a connection device capable of molding a spiral contactor into a three-dimensional shape with a prescribed height, especially by applying a heat treatment after molding it into a three-dimensional shape, and capable of reducing a deflection rate thereof. SOLUTION: A first heat treatment and a second heat treatment are applied after three-dimensionally molding the spiral contactor 20 into a prescribed shape. By the above heat treatments, a crystalline state of a metal element composing the spiral contactor 20 changes, the crystalline state is stabilized with the three-dimensional shape maintained, and stress is released. Therefore, the spiral contactor 20 can be appropriately formed into the three-dimensional shape with the prescribed height, and the deflection rate of the spiral contactor can be reduced even if a testing device 10 is repeatedly used. COPYRIGHT: (C)2005,JPO&NCIPI
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