SN-C STRUCTURES PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

摘要

An exemplary depositing method includes use of a plasma-enhanced chemical vapor depostion (PECVD) technique to deposit various exemplary tin and carbon compositions onto a surface. Such compositions are optionally suitable for use as anodes for lithium-ion batteries. Method parameters such as electromagnetic energy or power and temperature (e.g., substrate temperature, etc.) can affect characteristics of deposited compositions. Various exemplary compositions allow for interaction between tin and lithium and carbon and lithium to thereby increase lithium storage capacity. Various exemplary compositions exhibit superior long term cycling stability and are suitable for use as an anode or an anode material.