| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of stably fixing an electrode and a case member even by using a small electrode. <P>SOLUTION: A hot electrode (a second electrode) 50 has a shape with a T-shaped cross-section composed of a wide base part 53 positioned on the upper side and a narrow protrusion 52 protruded toward the earth electrode (a first electrode) 10 from the base part 53 on the lower side. Therefore, bolt holes 58a, 58b having sufficient depths can be formed even by using the small electrode, and members (case members) 7, 8 can be stably fixed to the hot electrode 50 as a result. Insertion holes 78, 88 to be inserted with bolts (rod-shaped fixing means) 98a, 98b are provided in the members 7, 8, and this insertion hole 78, 88 is formed into a slit having a long major axis, and can adjust the position of the hot electrode 50. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
