Apparatus and method for making a tensile diaphragm with a compressive region

摘要

An apparatus and method for making a composite tensile diaphragm having a nanopore. The apparatus provides a tensile layer in contact with a compressive layer. A small region of the tensile layer is removed to expose a small portion of the compressive layer. The compressive region of the tensile layer is small enough to avoid the buckling or wrinkling of the material. The apparatus has a length to thickness ratio from 10 to 60. Also disclosed is a method of making the apparatus.