POLARIZING BEAM SPLITTER FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polarizing beam splitter film capable of reflecting s polarized light with high wave face accuracy while holding polarized light separation characteristic having small incidence angle dependence, and to provide its manufacturing method. SOLUTION: The polarizing beam splitter film formed on a transparent base plate is constituted so that the phase shiftϕwhich appears when the s polarized light is reflected changes linearly with the variation of an incidence angleθin a desired incidence angleθrange and a desired wavelength range. COPYRIGHT: (C)2005,JPO&NCIPI