| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system and a processing method, which are capable of automatically effecting an interchanging work of several sheets among a plurality of sheets of wafers into monitor wafers, in a batch type processing system. SOLUTION: In a processing system 1 for processing a plurality of sheets of substrates W, there are provided a plurality of sheets transfer device 40, taking out in batch a plurality of sheets of the substrates W in block from a carrier CA for receiving the plurality of substrates W and storing the plurality of substrates W in batch into the carrier CA, and one sheet transfer device 41, taking out one sheet of substrate MW from an arbitrary place in the carrier CB to deliver the one sheet of the substrate MW to an arbitrary place in the plurality of sheets transfer device 40. COPYRIGHT: (C)2005,JPO&NCIPI
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