| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser probe measuring device having a simple optical system and high measurement accuracy. SOLUTION: This device has the first beam splitter 18 for branching laser light, and the second beam splitter 20 for transmitting one branched laser light. The device is equipped with an objective lens 22 for converging the laser light from the second beam splitter 20 onto a prescribed position so as to focus on the prescribed position near the measuring object surface 30a, and a photodiode 24 for detecting reflected light from the measuring object surface 30a. The device is also equipped with the third beam splitter 40 for branching the other laser light branched by the first beam splitter 18, and the second mirror 46 for reflecting the other laser light from the first mirror 42 and the third beam splitter 40 for reflecting light having a fixed relative position, having a fixed relative position to a stage 44 where the measuring object 30 is placed. The device is also equipped with a photodiode 48 for allowing reflected light from the first and second mirrors 42, 46 to interfere mutually, and receiving the light. COPYRIGHT: (C)2005,JPO&NCIPI
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