摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate joining technique which does not need a high-accuracy mirror polishing treatment and also does not need heating the glass substrate to a temperature higher than the glass transition point. SOLUTION: In the joining method, a plurality of glass substrates are joined to each other by (S1) forming hydroxy groups on the joining surfaces of the glass substrates, (S2) bringing the surfaces of the glass substrates to close contact with each other, and (S3), while the substrates being heated to a set temperature lower than the glass transition point, weighting the substrates with at least specified pressure set so as to become higher when the set temperature is lower. COPYRIGHT: (C)2005,JPO&NCIPI
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