Apparatus for heating wafer,申请号KR20020036624-传众专利搜索

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发明名称	Apparatus for heating wafer
摘要
申请公布号	KR100479947(B1)	申请公布日期	2005.03.30
申请号	KR20020036624	申请日期	2002.06.28
申请人		发明人
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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