RADIATION DETECTOR

摘要

A radiation detector is provided to prevent defects of a semiconductor film caused by a stacked structure of a common electrode and a semiconductor substrate. A radiation detector includes a semiconductor film sensitive to a radiation ray and a common electrode(2). The common electrode(2) is used for applying bias voltage. The bias voltage is stacked in the shape of a face on the surface of the semiconductor film. The radiation detector generates charges in the inside of the semiconductor film. The radiation detector includes a matrix substrate(3). A plurality of collection electrodes are formed on the surface of the substrate(3). An electric circuit for stacking and reading charges collected from the collection electrodes is wired on the substrate(3).