SCANNING ELECTRON MICROSCOPE

摘要

A scanning electron microscope is provided to prevent a worker from being exposed to high-voltage while expanding a life span thereof by preventing a short circuit of a voltage cable. A scanning electron microscope includes an electron gun(10) for radiating electronic beam onto a sample in order to detect secondary electron generated from the sample. The electron gun(10) includes an insulation pin unit(14) and a cable unit(16). The insulation pin unit(14) has a housing and a plurality of insulation pins(14a) protruding from the housing. The insulation pin unit(16) is installed in an emitter assembly. The cable unit(16) includes a connector having pin insertion holes(16a), into which the insulation pins(14a) are inserted. A conductive material layer is formed at an inner portion of each pin insertion hole(16a).