SUBSTRATE TRANSPORT METHOD AND APPARATUS, AND SUBSTRATE PROCESSING SYSTEM,申请号KR19990008361-传众专利搜索

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发明名称	SUBSTRATE TRANSPORT METHOD AND APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号	KR100479344(B1)	申请公布日期	2005.03.25
申请号	KR19990008361	申请日期	1999.03.12
申请人		发明人
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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