发明名称 BASE BOARD STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a base board storage device capable of contributing to reduction in equipment cost, by reducing the height of a manufacturing line building, by reducing the whole height of the base board storage device for storing an extra large base board, by reducing a vertical interval of support members, by taking in and out the base board without inserting a robot hand. SOLUTION: This base board storage device has a lifting device 4 for lifting a base board storage part 1, a plurality of carrying support members 5 inserted between the support members 2 by lifting of the base board storage part 1, and receiving the base board 3 supported by the support members 2, and a sending mechanism 6 arranged on the tip of the carrying support members 5, and sending the received base board 3 outside the base board storage part 1. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005075643(A) 申请公布日期 2005.03.24
申请号 JP20040016070 申请日期 2004.01.23
申请人 HITACHI KIDEN KOGYO LTD 发明人 CHINBE HIROSHI
分类号 B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B65G49/06 主分类号 B65G49/06
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