摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost photodetecting element having a spectral sensitivity curve that resembles the luminous-efficiency curve of human beings without using any heavy metal nor any infrared filter. SOLUTION: The luminous-efficiency corrected photodetecting element comprises (a) a silicon substrate layer having a high impurity concentration with specific resistivity of 0.1Ωcm or lower, (b) an epitaxial layer formed on the silicon substrate layer, having a thickness of 0.1μm or thicker and 10μm or thinner, and having a low impurity concentration with specific resistivity of 1Ωcm or higher, and (c) a PN junction formed on the epitaxial layer. COPYRIGHT: (C)2005,JPO&NCIPI
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